Products

The main products include: LPCVD, PECVD, atmospheric and low-pressure diffusion furnaces, oxidation furnaces, annealing furnaces, special gas cabinets, tail gas treatment and other semiconductor gas treatment equipment, graphene, vertical vacuum furnaces, hydrogen furnaces, heat treatment furnaces and other vacuum thermal equipment.

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Semiconductor Process Equipmen

Modular And AutomatedScalable And Highly Reliable

01
Special Gas&Waste Gas Treatment

Dealing With Gases Generated During Semiconductor Manufacturing Processes, Such As Chlorine, Sulfuric Acid, Fluoride, Chloride, Chlorine, Etce, sulfuric acid, fluoride, chloride, chlorine, etc

02
Vacuum/Atmosphere Furnace Series

Suitable For Sintering, Annealing, Diffusion Infiltration And Other Processes Of High-Performance Magnetic Materials Such As Qiniron Boron

03
Factory Automation And Upgrading And Renovation

Equipment and Factory Production Automation Industry 4.0

04

High temperature annealing furnace (2200)

12 "oxidation LPCVD furnace (production type)

8 "Oxidized LPCVD Furnace (Production Type)

Fully automatic oxidation diffusion LPCVD furnace

Combustion (electric)+wet flue gas treatment machine series

Wet exhaust gas treatment machine series

Plasma exhaust gas treatment machine series

Rack

Horizontal tube furnace (glove box)

Details

Horizontal tube furnace (glove box)

Equipment and Factory Production Automation _ Industry 4.0

Details

Equipment and Factory Production Automation _ Industry 4.0

Qingdao Huaqi Technology Co., Ltd.

Unity, Hard Work, Innovation, And Exploration

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Qingdao Jingcheng Huaqi has excellent research, design, manufacturing and service teams. It has completed and completed a series of outstanding members for China Electronics Special Equipment Association, China Magnetic Materials and Devices Association and other associations. Design and manufacture of special equipment for national key projects.

1993year

Establishment Time

J
8000㎡

Purification Plant

C
30year

R&D Experience

M
60+

Utility Patent

E
1000+

USER

E

中 / EN

Products

Semiconductor Process Equipmen

Modular And AutomatedScalable And Highly Reliable

Special Gas&Waste Gas Treatment

Dealing With Gases Generated During Semiconductor Manufacturing Processes, Such As Chlorine, Sulfuric Acid, Fluoride, Chloride, Chlorine, Etce, sulfuric acid, fluoride, chloride, chlorine, etc

Vacuum/Atmosphere Furnace Series

Suitable For Sintering, Annealing, Diffusion Infiltration And Other Processes Of High-Performance Magnetic Materials Such As Qiniron Boron

Factory Automation And Upgrading And Renovation

Equipment and Factory Production Automation Industry 4.0

High temperature annealing furnace (2200)

12 "oxidation LPCVD furnace (production type)

8 "Oxidized LPCVD Furnace (Production Type)

Fully automatic oxidation diffusion LPCVD furnace

Combustion (electric)+wet flue gas treatment machine series

Wet process+combustion waste gas treatment

Wet exhaust gas treatment machine series

Wet flue gas treatment

Plasma exhaust gas treatment machine series

Ammonia decomposition waste gas treatment

Rack

Horizontal tube furnace (glove box)

Equipment and Factory Production Automation _ Industry 4.0

Qingdao Huaqi Technology Co., Ltd.

Unity, Hard Work, Innovation, And Exploration

Industry News

News

10

04 2024

10

04 2024

03

07 2023

03

07 2023

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02 2023

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02 2023

01

03 2021

01

03 2021

19

03 2018

19

03 2018

Excellent Scientific Research.Design.Manufacture.Service Team

Qingdao Huaqi Technology Co., Ltd.

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